Technical Program
Friday, June 01, 2012
Session 3: MEMS Integration and Processing
8:00 AM - 11:40 AM
Committee: Emerging Technologies
Harbor Island III
Session Co-Chairs:
|
John Cunningham Oracle T +1-858-526-9121 F john.cunningham@oracle.com |
P. Markondeya Raj Georgia Institute of Technology T 404 558 2615 F raj@ece.gatech.edu |
Papers:
1. 8:00 AM - Electronic Packaging of Sensors for Lower Limb Prosthetics
J. Kelly Lee - College of Nanoscale Science and Engineering
Nancy Stoffel - College of Nanoscale Science and Engineering
Kevin Fite - Clarkson University
2. 8:25 AM - Cost Effective Thin Film Packaging for Wide Area MEMS
J.L. Pornin - CEA-LETI
D. Saint-Patrice - CEA-LETI
C. Gillot - CEA-LETI
E. Lagoutte - CEA-LETI
M. Pellat - CEA-LETI
S. Fanget - CEA-LETI
3. 8:50 AM - Low Temperature Sealing Process for Vacuum MEMS Encapsulation
D. Saint-Patrice - CEA-LETI
J.L. Pornin - CEA-LETI
B. Savornin - CEA-LETI
G. Rodriguez - CEA-LETI
S. Danthon - CEA-LETI
S. Fanget - CEA-LETI
4. 10:00 AM - On-Chip THz 3D Antennas
Paolo Nenzi - University of Rome
Francesco Tripaldi - University of Rome
Volha Varlamava - University of Rome
Fabrizio Palma - University of Rome
Marco Balucani - University of Rome
5. 10:25 AM - A CMOS Embedded RF-MEMS Tunable Capacitor for Multi-Band/Multi-Mode Smartphones
Y. Kurui - Toshiba Corporation
H. Yamazaki - Toshiba Corporation
Y. Shimooka - Toshiba Corporation
T. Saito - Toshiba Corporation
E. Ogawa - Toshiba Corporation
T. Ogawa - Toshiba Corporation
T. Ikehashi - Toshiba Corporation
Y. Sugizaki - Toshiba Corporation
H. Shibata - Toshiba Corporation
6. 10:50 AM - High Power Laminate MEMS RF Switch
Sung Jun Kim - University of California, Irvine
Yang Zhang - University of California, Irvine
Minfeng Wang - University of California, Irvine
Mark Bachman - University of California, Irvine
G.-P. Li - University of California, Irvine
7. 11:15 AM - A Novel Electrostatic Radio Frequency Micro Electromechanical Systems (RF MEMS) with Prognostics Function
Yunhan Huang - University of Maryland
Michael Osterman - University of Maryland
Michael Pecht - University of Maryland
